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Summary
| Description | Self-aligned blocking makes use of lines of different materials which are cut by separate etches. The selective etches allow the lines to cross lines of different materials. The loop end cut/trim is at the right. Ref.: N. Mohanty et al., Proc. SPIE 10147, 1014704 (2017). Here, the “core” features are those features which support the final spacer, while the “gap” features are those which located in the remaining gaps between final spacers. |
| Date | |
| Source | Excel drawing |
| Author | Guiding light |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2019-03-03 06:03:53 | 418 × 1045 | Guiding light | |
| 2019-03-03 04:37:35 | 418 × 1045 | Guiding light | |
| 2018-10-05 12:53:49 | 529 × 2234 | Guiding light | |
| 2018-09-30 07:00:33 | 528 × 2234 | Guiding light | |
| 2018-09-29 16:25:37 | 528 × 2234 | Guiding light | |
| 2018-08-25 09:51:40 | 528 × 2234 | Guiding light | Illustrates process flow |
| 2018-03-10 08:22:23 | 605 × 581 | Guiding light | |
| 2017-12-24 05:01:46 | 605 × 581 | Guiding light | |
| 2017-12-22 12:22:15 | 476 × 596 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
copyright license
GNU Free Documentation License, version 1.2 or later
Creative Commons Attribution-ShareAlike 4.0 International
inception
22 December 2017
media type
image/png
data size
23,630 byte
height
1,045 pixel
width
418 pixel
checksum
cb5f974a70c19930f4cf218ae2c38fff134bec7e
determination method or standard: SHA-1