Size of this preview: 800 × 250 pixels. Other resolutions: 320 × 100 pixels | 990 × 309 pixels.
Original file (990 × 309 pixels, file size: 16 KB, MIME type: image/png)
Summary
| Description |
English: Self-aligned via patterning scheme. Left: Patterned unfilled trenches (blue). Center: Resist mask. Right: Vias patterned by etching through resist mask and hardmask (purple) surrounding trenches (blue). |
||
| Date | |||
| Source | PowerPoint drawing | ||
| Author | Guiding light | ||
| Other versions |
|
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution:
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.
Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2015-08-26 11:04 | 994×309× (18501 bytes) | Guiding light | new label placement |
| 2015-08-26 11:02 | 994×313× (10987 bytes) | Guiding light | new label placement |
| 2015-08-26 11:01 | 994×313× (18535 bytes) | Guiding light | Corrected label of right picture |
| 2015-07-22 16:11 | 984×309× (18233 bytes) | Guiding light | fixed some glitches |
| 2015-07-22 15:37 | 984×309× (18248 bytes) | Guiding light | adjusted position of right oval |
| 2015-07-22 15:36 | 984×309× (18236 bytes) | Guiding light | slight modification of positions |
| 2015-07-22 14:43 | 984×309× (17810 bytes) | Guiding light | Different picture |
| 2015-07-22 12:53 | 1004×309× (15295 bytes) | Guiding light | Left figure caption change |
| 2015-07-22 12:50 | 1004×311× (15350 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
copyright license
GNU Free Documentation License, version 1.2 or later
Creative Commons Attribution-ShareAlike 3.0 Unported
inception
22 July 2015
data size
16,277 byte
height
309 pixel
width
990 pixel
media type
image/png
checksum
a9d612a55f764d09e22ceb267000e5c48d77f122
determination method or standard: SHA-1
